| 摘要 |
PROBLEM TO BE SOLVED: To provide a test method and an inspection device of substrates capable of conducting detailed inspection, without installing test land. SOLUTION: In the inspection device, an inspection processing (S120) is performed using CLK signal of a first frequency preset as a first inspection. In this first inspection, the value which an output cell CO1 retains is made to be output to the output cell CO1 of a first device; and then after the elapsed time of the reciprocal of a first frequency, the value input from an input terminal IN2 of a second device is made to be fetched to the input cell CI2 of the second device. As a second inspection, the inspection processing (S160) is performed, using CLK signal of the second frequency which is lower than the first frequency. In this second test, the value the output cell CO1 retains is made to output to the output cell CO1 of the first device, and then, after the lapse of the reciprocal of the second frequency, the value input from an input terminal IN2 of the second device is made to be fetched to the input cell CI2 of the second device. COPYRIGHT: (C)2005,JPO&NCIPI
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