| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an inkjet recording head which realizes a superior scratching resistance (paper jamming countermeasure) and an ink discharging stability in the inkjet recording head that uses a nozzle plate composed of a silicon single crystal material, and which can simply and precisely form nozzles and counter boring (nozzle step) at a nozzle plate composed of a silicon single crystal material. SOLUTION: For example, in an inkjet recording head constituted with the nozzle plate 10 consisting of a silicon single crystal substrate, a cavity plate 12 consisting of a silicon single crystal substrate, and a glass substrate 14 stacked, the counter boring 24 (nozzle step) is set in the periphery of an ink nozzle 22. Moreover, the ink nozzle 22 and the counter boring 24 are continuously formed by dry etching from the nozzle plate 10 face at the discharging direction side of ink. COPYRIGHT: (C)2005,JPO&NCIPI
|
