发明名称 STRUCTURED MATERIALS AND METHODS
摘要 In general, in one aspect, the invention features methods for forming structured materials that include providing a layer including a first material; patterning the layer while a surface of the layer is exposed without the need for a processing layer, such as a resist; permeating the patterned layer with a precursor; and reacting the precursor within the pattemed layer to form a structured material.
申请公布号 WO2005072235(A2) 申请公布日期 2005.08.11
申请号 WO2005US01843 申请日期 2005.01.21
申请人 UNIVERSITY OF MASSACHUSETTS;WATKINS, JAMES, J. 发明人 WATKINS, JAMES, J.
分类号 B81C99/00;G03F7/00 主分类号 B81C99/00
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