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发明名称
VORRICHTUNG ZUR AUFNAHME VON SUBSTRATEN
摘要
申请公布号
DE50300739(D1)
申请公布日期
2005.08.11
申请号
DE20035000739
申请日期
2003.03.31
申请人
ASTEC HALBLEITERTECHNOLOGIE GMBH
发明人
NIESE, MATTHIAS;FRANZKE, JOERG;SCHWECKENDIEK, JUERGEN
分类号
H01L21/00;H01L21/68;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
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