| 摘要 |
PROBLEM TO BE SOLVED: To remove a conductive film for a stopper forming an opening for blowing out a fuse without increasing steps. SOLUTION: An interlayer insulating film 3 is formed on a fuse 2 and a conductive film 5 for the stopper is formed at a position overlapped on the fuse 2 on the interlayer insulating film 3. An interlayer insulating film 6 is formed on the interlayer insulating film 3 and the conductive film 5 for the stopper, and an opening 6b for blowing out the fuse is formed in the interlayer insulating film 6 so as to be positioned on the conductive film 5 for the stopper. A conductive film is formed on the interlayer insulating film 6 and in the opening 6b for blowing out the fuse, and is patterned by etching to form a pad 7a, and also the conductive film 5 for the stopper is thinned in the opening 6b for blowing out the fuse by over-etching. After a passivation film 9 is formed, a pad opening 9a is formed in the passivation film 9. Also, after the passivation film 9 is removed from the opening 6b for blowing out the fuse, the conductive film 5 for the stopper is removed from the opening 6b for blowing out the fuse by etching. COPYRIGHT: (C)2005,JPO&NCIPI
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