Method of providing a substrate surface with a patterned layer

摘要

A method of manufacturing a patterned layer ( 4 ) on a substrate comprises providing a substrate surface ( 2 ) with a dam structure ( 6 ) partitioning the substrate surface into a plurality of compartments for containing fluid from which regions of the patterned layer are obtainable, filling, using a west deposition method, compartments with volumes of fluid and then obtaining from the volumes of fluid regions of the patterned layer. In order to obtain a patterned layer which has a relatively large thickness and a good uniformity in thickness, the filling and obtaining is done in several passes, each pass comprising filling a selection of compartments with fluid having a volume larger than the volume of the compartment and obtaining the corresponding regions therefrom, taking care in no selection two compartments which are nearest-neighbor of each other are included.