| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of detecting a position which can prevent the deterioration of position detection accuracy caused by the movement of the image of an alignment mark. SOLUTION: When an XY rectangular coordinate system is defined on the surface of an object, the alignment mark formed on the object is observed by an observation device having an optical axis inclined from a normal on the front surface of the object in a Y-axis direction, and the image of the alignment mark is formed on an image receiving surface. When a uv rectangular coordinate system which sets a u-axis defined in the direction corresponding to an X-axis and a v-axis defined in the direction perpendicular to the u-axis is defined, a position relating to the v-axis direction of the image of the alignment mark is detected. The observing device is moved in the Y-axis direction so that the image on the image receiving surface moves to an observing reference position with respect to the v-axis direction. COPYRIGHT: (C)2005,JPO&NCIPI |
