发明名称 METHOD AND DEVICE FOR INSPECTING SEMICONDUCTOR LASER
摘要 PROBLEM TO BE SOLVED: To provide an inspecting method with which the transmission characteristic of an element can be inspected in short time, and to provide an inspecting device suitable for the inspecting method. SOLUTION: In inspection of a distribution feedback-type semiconductor laser which has diffraction grating having a phase shift, the spectrum of the distribution feedback-type semiconductor laser is measured. A difference▵L between strength L<SB>1</SB>of a side mode M<SB>1</SB>on a short wave-side of a main mode M<SB>0</SB>and strength L<SB>2</SB>of a side mode M<SB>2</SB>on a long wave-side is calculated. When▵L is equal to or more than a constant value, the distribution feedback-type semiconductor laser is judged to be an excellent article. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005217011(A) 申请公布日期 2005.08.11
申请号 JP20040019699 申请日期 2004.01.28
申请人 MITSUBISHI ELECTRIC CORP 发明人 OKUNUKI YUICHIRO
分类号 H01L21/66;H01S5/00;H01S5/12;(IPC1-7):H01S5/00 主分类号 H01L21/66
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