ULTRASONIC DISTANCE MEASURING METHOD, ULTRASONIC DISTANCE MEASURING DEVICE AND ULTRASONOGRAPH

摘要

PROBLEM TO BE SOLVED: To measure a thickness variation in a measuring object without using an ultrasonic image, by reducing influence such as noise. SOLUTION: This ultrasonic distance measuring method measures a distance variation between two points of a measured object by using an ultrasonic wave. The method includes a step of measuring a position variation for a predetermined period in a plurality of measured object positions including the measured object on an acoustic line, by setting the acoustic line of the ultrasonic wave so as to include two points of the measured object; a step of measuring a force variation in force for generating a distance change between two points of the measured object for a predetermined period, simultaneously when measuring the position variation in the measuring object positions; a step of respectively determining the distance variation between the respective measured object positions from the position variation in the plurality of measured object positions; and a step of determining the distance variation having a profile most coincident with a profile of the force variation as the distance variation between two points of the measured object, by comparing the force variation with the respective distance variations in the predetermined period. COPYRIGHT: (C)2005,JPO&NCIPI