发明名称 |
Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates |
摘要 |
Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.
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申请公布号 |
US2005176245(A1) |
申请公布日期 |
2005.08.11 |
申请号 |
US20040774699 |
申请日期 |
2004.02.09 |
申请人 |
MELECHKO ANATOLI V.;MCKNIGHT TIMOTHY E.;GUILLORN MICHAEL A.;ILIC BOJAN;MERKULOV VLADIMIR I.;DOKTYCZ MITCHEL J.;LOWNDES DOUGLAS H.;SIMPSON MICHAEL L. |
发明人 |
MELECHKO ANATOLI V.;MCKNIGHT TIMOTHY E.;GUILLORN MICHAEL A.;ILIC BOJAN;MERKULOV VLADIMIR I.;DOKTYCZ MITCHEL J.;LOWNDES DOUGLAS H.;SIMPSON MICHAEL L. |
分类号 |
B01D67/00;B01D71/02;B01J23/755;B01L3/00;H01L21/44;(IPC1-7):H01L21/44 |
主分类号 |
B01D67/00 |
代理机构 |
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代理人 |
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地址 |
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