| 摘要 |
PROBLEM TO BE SOLVED: To easily and precisely analyze a shape even when a distance up to a measured object is varied, by providing a range finding means for measuring the distance up to the measured object, a focus regulating means for regulating focuses of a projection lens system and an image-focusing lens system in response to a measuring distance, and a fringe sensitivity calculating means for calculating fringe sensitivity of a moire fringe under a focus-regulated condition. SOLUTION: The range finding means is constituted of a CCD camera 52 and a distance calculating means 75, and the focus regulating means is constituted of the second moving stage 66 for supporting the both lens systems 42, 44, a focus motor 67, a driver 79 and a focus regulating part 74. The fringe sensitivity calculating means is constituted of a fringe sensitivity regulating part 71, and regulates a distance between both axes Ax1, Ax2 to bring the fringe sensitivity of the moire fringe under the focus-regulated condition into a prescribed fringe sensitivity. COPYRIGHT: (C)2005,JPO&NCIPI
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