发明名称 Fluid ejection device with compressive alpha-tantalum layer
摘要 A fluid ejection device is disclosed. The fluid ejection device may include a substrate including a heating element and a passivation layer in contact with the heating element. The fluid ejection device may further include a buffer layer in contact with the passivation layer and a compressive alpha-tantalum layer in contact with, and lattice matched to, the buffer layer.
申请公布号 US2005175768(A1) 申请公布日期 2005.08.11
申请号 US20050065933 申请日期 2005.02.25
申请人 FARTASH ARJANG 发明人 FARTASH ARJANG
分类号 B41J2/14;(IPC1-7):B05D5/12;B05D1/36 主分类号 B41J2/14
代理机构 代理人
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