| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater capable of keeping reliability for strength of a joint member without increasing conductor resistance of the joint member when an electrode pad is brazed to the joint member by using a copper-based brazing material. SOLUTION: The joint member 130 is formed of a clad material formed by cladding a nickel member 131 containing nickel not less than 90 wt.% and an S/S member 132 containing iron as a main constituent, and containing at least chromium and nickel not less than 30 wt.%. The joint member 130 is brazed on the electrode pad 121 by a brazing material 124 containing more than 50 wt.% of copper. Since the brazing temperature is high, heat resistance of the joint part is improved. Although the nickel member 131 is annealed by heating with the brazing and its strength is made to be easily degraded, it is reinforced by the S/S member 132, whereby the strength as the joint member 130 is not degraded. COPYRIGHT: (C)2005,JPO&NCIPI
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