Timing calibration apparatus, timing calibration method, and device evaluation system

摘要

The present invention provides a timing calibration apparatus and method capable of supplying a calibration data set for high-accurate timing calibration to a test apparatus including branch tester pins and a device evaluation system including the apparatus. In the system, a calibration data acquisition circuit and a calibration-data generation and storage circuit acquire a calibration data set for timing calibration of test signals in each of single and double mounted states on every test condition. Upon device test, a calibration data selection circuit determines a device mounted state and a test condition on the basis of a mount signal supplied from a mounted state sensor and a test condition signal supplied from a measurement situation sensor. The calibration data selection circuit selects the optimum one of a plurality of data sets stored in the calibration-data generation and storage circuit and then generates the selected one to the test apparatus.