发明名称 Magnetic sensor apparatus and manufacturing method thereof
摘要 Two Hall element forming arrangements are formed on a semiconductor substrate. Each Hall element forming arrangement includes a Hall element that is formed in a principal surface of the semiconductor substrate. A base is formed separately from the semiconductor substrate. Then, the base is disposed at a rear surface of the semiconductor substrate and holds the semiconductor substrate and the Hall element forming arrangements. The base includes a holding surface, which holds the semiconductor substrate, and two slant surfaces, each of which is slanted relative to the holding surface. Each Hall element forming arrangement is held on a corresponding one of the at least one slant surface of the base.
申请公布号 US2005174112(A1) 申请公布日期 2005.08.11
申请号 US20050050672 申请日期 2005.02.07
申请人 DENSO CORPORATION 发明人 WAKABAYASHI SHINJI;OOHIRA SATOSHI;KAWASHIMA TAKASHI
分类号 G01B7/14;G01D5/14;G01R33/07;H01L43/04;H01L43/06;H01L43/12;H01L43/14;(IPC1-7):G01B7/14 主分类号 G01B7/14
代理机构 代理人
主权项
地址