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发明名称
Vertikal-Transistor, Speicheranordnung sowie Verfahren zum Herstellen eines Vertikal-Transistors
摘要
申请公布号
DE10130766(B4)
申请公布日期
2005.08.11
申请号
DE20011030766
申请日期
2001.06.26
申请人
INFINEON TECHNOLOGIES AG
发明人
HAGEMEYER, PETER
分类号
H01L21/28;H01L21/336;H01L27/115;H01L29/78;H01L29/792;(IPC1-7):H01L29/78;H01L27/105
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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