| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a non-calcinated piezoelectric structure and a manufacturing method of it, with which a piezoelectric structure of high mechanical impedance is created by using the hollow object of a conductive metal, especially, a fine hollow object whose diameter is 3mm or below and vibration of the structure with high mechanical stiffness can be detected with high sensitivity. <P>SOLUTION: The non-calcinated piezoelectric structure consists of the hollow object of the conductive metal, a linear object of the conductive metal, which is positioned in a center part of the hollow object, and PZT compound powder with which the hollow object is filled and whose grain size is 0.1 to 5μm. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
