| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cryogenic refrigerator capable of not only improving heat transfer efficiency but also simplifying a manufacturing process by simplifying a structure to facilitate washing and degassing work. <P>SOLUTION: A heat exchange chamber 53 is provided between a case 50 and a cylinder 52, and an internal heat exchanger 60 arranged in the heat exchange chamber is composed of a ringlike body 62 adhering closely to the case and the cylinder and a plurality of through holes 64 formed to let working fluid pass through the ringlike body. Consequently, the structure becomes simple, and the manufacturing process becomes simple. In addition, washing and degassing work can be easily performed. Heat transfer area in the limited heat exchange chamber is enlarged to the maximum extent to improve heat transfer efficiency. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
