摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which can be operated at a high frequency, the realization of which is difficult by a bulk elastic wave and a surface acoustic wave of prior arts, and in which the propagation characteristic or the resonance characteristic of a Lamb wave propagated in a piezoelectric substrate can be controlled. SOLUTION: The piezoelectric vibrator includes: the piezoelectric substrate 12 formed to propagate a Lamb wave inside the substrate; exciting electrodes 13, 23, 33 for exciting the Lamb wave; and reflectors 16, 17 for reflecting the Lamb wave excited by the exciting electrodes 13, 23, 33, and at least any of the exciting electrodes 13, 23, 33 or the reflectors 16, 17 is provided on both of the surface 12a and the rear surface 12b of the piezoelectric substrate 12. COPYRIGHT: (C)2005,JPO&NCIPI
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