| 摘要 |
PROBLEM TO BE SOLVED: To provide a transmission electron microscope system which finds an objective observation region in a large observation region automatically in a short time and obtains a desired transmission electron microscope image. SOLUTION: A computer 5 determines whether a picture signal is obtained for a whole mesh M region, using a montage technique. The computer 5 performs image processing of an obtained picture, and determines in which position of the mesh a sample is. A view picture which is formed by putting the sample position judged by the computer 5 on the whole mesh region, is displayed on a display 7. Then, the computer 5 changes magnification higher by controlling an electron optical system. This magnification value is suitably high for observing an observation position of the sample in detail. When the magnification is changed higher, focus tuning of an electron beam is automatically performed by the control of the computer 5 if necessary. Then, an operator instructs a position in the sample, that is to be observed in detail, by mouse clicking for example. COPYRIGHT: (C)2005,JPO&NCIPI
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