| 摘要 |
PROBLEM TO BE SOLVED: To laminate a disk substrate to a cover sheet while surely adhering the cover sheet to the mounting surface of a support table even when the cover sheet tends to be deformed. SOLUTION: In the device for manufacturing an optical disk, when a cover sheet 24 is mounted on the mounting surface 49 of a support table 48, an air flow is jetted from an air nozzle 142, this air flow is sprayed to the cover sheet 24, and the cover sheet 24 is attracted on the mounting surface 49 by an electrostatic chuck 132 disposed in the support table. Thus, even when the cover sheet 24 tends to be deformed, while the cover sheet 24 is corrected to be flat by the air flow, the entire cover sheet 24 is adhered on the mounting surface of the support table by electrostatic power from the electrostatic chuck 132. Then, the disk substrate 12 is mounted on the cover sheet 24 in vacuum atmosphere, and the disk substrate 12 is pressed to be laminated to the cover sheet 24. COPYRIGHT: (C)2005,JPO&NCIPI
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