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申请公布号
JP3682245(B2)
申请公布日期
2005.08.10
申请号
JP20010203712
申请日期
2001.07.04
申请人
发明人
分类号
C23C22/00;B05D7/14;B23K35/14;B23K35/40;C23C22/73;C23C26/00;H01L23/12;H05K3/34;(IPC1-7):H01L23/12
主分类号
C23C22/00
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