Electrode cartridge and a system for measuring internal stress of an electroplated film

摘要

The electrode cartridge (10) for measuring an internal stress of a film of plating includes a cathode support (11), an anode support (12), a shield plate (13) and an anode shell (14). The anode support (12) supports an anode plate (A) so that the anode plate (A) is opposite to the cathode plate (C) with a predetermined spacing. The shield plate (13) is interposed between the cathode plate (C) and the anode plate (A). A through hole (13) is made in the shield plate (13) in such a manner that the through hole (13) confronts a plating section (CP) and has a geometry which is reduced by a first predetermined scale factor relative to a geometry of the plating section (CP). An opening (14a) is made in the anode shell (14) in such a manner that the opening (14a) confronts the plating section (CP) and has a geometry which is magnified by a second predetermined scale factor relative to the geometry of the plating section (CP).