Diffractive optical element, and optical system and optical apparatus provided with the same

摘要

A diffractive optical element of the blazed-binary grating type is disclosed, with which a high diffraction efficiency can be achieved over substantially the entire used wavelength region. The diffractive optical element has a periodic structure taking a grating unit including a plurality of grating portions with different grating width and grating interval as one period. The diffraction element further includes a plurality of first grating portions made of a first material and a plurality of second grating portions made of a second material having a different refractive index than the first material that are arranged between the first grating portion.