发明名称 NAND type dual bit nitride read only memory
摘要 A NAND type dual bit nitride read only memory and a method for fabricating thereof are provided. Firstly, a plurality of isolation layers, which are spaced and parallel to each other are formed in the substrate. Next, a plurality of word lines and a plurality of oxide-nitride-oxide (ONO) stack structures are formed on the substrate. The word lines are spaced and parallel to each other, and also the word lines are perpendicular to the isolation layers. Each of the ONO stack structure is located between the corresponding word line and the substrate. And then a plurality of discontinuous bit lines, which are located between the word lines and between the isolation layers are formed on the substrate. The structure of the present invention of the NAND type dual bit nitride read only memory is similar to that of a complementary metal-oxide semiconductor (CMOS), and their fabrication processes are fully compatible.
申请公布号 US6927448(B2) 申请公布日期 2005.08.09
申请号 US20030682861 申请日期 2003.10.14
申请人 发明人
分类号 H01L21/8246;H01L27/115;H01L29/792;(IPC1-7):H01L29/788 主分类号 H01L21/8246
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