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发明名称
ETCHING MASK
摘要
申请公布号
KR20050078975(A)
申请公布日期
2005.08.08
申请号
KR20040064594
申请日期
2004.08.17
申请人
PIONEER CORPORATION
发明人
NAGAYAMA KENICHI;SHIRATORI MASAHIRO;YOSHIZAWA TATSUYA
分类号
H01L21/027;G03F1/00;G03F7/20;H01L21/00;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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