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发明名称
VACUUM DEVICE OF SEMICONDUCTOR MANUFACTURING EQUIPMENT HAVING IMPROVED BELLOWS
摘要
申请公布号
KR100506935(B1)
申请公布日期
2005.08.05
申请号
KR20030017584
申请日期
2003.03.20
申请人
发明人
分类号
H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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