DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS,申请号EP20010934877-传众专利搜索

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发明名称	DEPOSITED THIN FILMS AND THEIR USE IN SEPARATION AND SARCRIFICIAL LAYER APPLICATIONS
摘要
申请公布号	EP1280617(A4)	申请公布日期	2005.08.03
申请号	EP20010934877	申请日期	2001.04.17
申请人	THE PENN STATE RESEARCH FOUNDATION	发明人	FONASH, STEPHEN, J.;KALKAN, ALI, KAAN;BAE, SANGHOON;HAYES, DAN;NAM, WOOK, JUN;CHANG, KYUHWAN;LEE, YOUNGCHUL
分类号	B81B3/00;B81C1/00;C23C16/24;C23C16/511;H01L21/306;H01M8/02;(IPC1-7):B05D5/12	主分类号	B81B3/00
代理机构		代理人
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