发明名称 IMPEDANCE MEASURING CIRCUIT, ITS METHOD, AND CAPACITANCE MEASURING CIRCUIT
摘要 <p>An electrostatic capacitance detection circuit 10 comprises a DC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential, an impedance converter 16, a resistance (R1) 12 connected between the DC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and a capacitor 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential. <IMAGE></p>
申请公布号 EP1426772(A4) 申请公布日期 2005.08.03
申请号 EP20020767921 申请日期 2002.09.06
申请人 TOKYO ELECTRON LIMITED 发明人 YAKABE, MASAMI;IKEUCHI, NAOKI
分类号 G01N27/22;G01R27/26;H04R29/00;(IPC1-7):G01R27/26;H04R3/06;G01D5/24 主分类号 G01N27/22
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