发明名称 |
IMPEDANCE MEASURING CIRCUIT, ITS METHOD, AND CAPACITANCE MEASURING CIRCUIT |
摘要 |
<p>An electrostatic capacitance detection circuit 10 comprises a DC voltage generator 11, an operational amplifier 14 of which non-inverting input terminal is connected to specific potential, an impedance converter 16, a resistance (R1) 12 connected between the DC voltage generator 11 and an inverting input terminal of the operational amplifier 14, a resistance (R2) 13 connected between the inverting input terminal of the operational amplifier 14 and an output terminal of the impedance converter 16, and a capacitor 15 connected between an output terminal of the operational amplifier 14 and an input terminal of the impedance converter 16. A capacitor to be detected 17 is connected between the input terminal of the impedance converter 16 and specific potential. <IMAGE></p> |
申请公布号 |
EP1426772(A4) |
申请公布日期 |
2005.08.03 |
申请号 |
EP20020767921 |
申请日期 |
2002.09.06 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
YAKABE, MASAMI;IKEUCHI, NAOKI |
分类号 |
G01N27/22;G01R27/26;H04R29/00;(IPC1-7):G01R27/26;H04R3/06;G01D5/24 |
主分类号 |
G01N27/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|