Active cantilever for nanomachining and metrology

摘要

A probe assembly suited for use in a scanning probe microscope (SPM) system includes a cantilever have an attachment to a main body portion. A suitable tip disposed at the free end of the cantilever provides various functions. According to various embodiments of the invention, the tip and cantilever members have active components to produce kinetic action, thus facilitating the utility of the probe assembly in various SPM applications.