| 摘要 |
A measurement light (X) is introduced on either one of reflection surfaces ( 501, 502, 511, 512 ) to detect a returned light (Y) reflected by the reflection surfaces ( 501, 502, 511, 512 ), reflected by a reflecting device and again reflected by the reflection surfaces ( 501, 502, 511, 512 ) by an autocollimator ( 620 ) to conduct image-processing and calculation by a processor ( 628 ), where a position adjuster ( 690 ) adjusts an attitude of a cross dichroic prism ( 45 ) relative to a fixing plate ( 447 ) to eliminate deviation between a position of the measurement light (X) and the returned light (Y) based on the result of the processing, thereby producing a highly accurate prism unit ( 50 ).
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