Thermally cured underlayer for lithographic application

摘要

Thermally cured undercoat for use in lithography of a thermally cured composition comprising a hydroxyl-containing polymer, an amino cross-linking agent and a thermal acid generator, wherein the hydroxyl containing polymer is a polymer comprising units m, n and o of the following formula: wherein R¹ is H or methyl; R² is a substituted or unsubstituted C₆-C₁₄ aryl acrylate or C₆-C₁₄ aryl methacrylate group wherein the substituted groups may be phenyl, C_1-4 alkyl or C_1-4 alkoxy; R³ is a hydroxyl functionalized C₁-C₈ alkyl acrylate, methacrylate or C₆-C₁₄ aryl group, R⁴ is a C₁-C₁₀ linear or branched alkylene; p is an integer of from 1 to 5 with the proviso that there are no more than thirty carbon atoms in the [-R⁴O-]_p; R⁵ is a C₁-C₁₀ linear, branched or cyclic alkyl, substituted or unsubstituted C₆-C₁₄ aryl, or substituted or unsubstituted C₇-C₁₅ alicyclic hydrocarbon; and m is about 40 to 70, n is about 15 to 35 and o is about 15 to 25.