发明名称 Through silicon via, folded flex microelectronic package
摘要 A microelectronic package including a microelectronic die having through silicon vias extending through a back surface thereof, which allows both an active surface and the back surface of the microelectronic die to have power, ground, and/or input/output signals connected to a flexible substrate. The flexible substrate may further connected to an external substrate through at least one external contact.
申请公布号 US6924551(B2) 申请公布日期 2005.08.02
申请号 US20030447493 申请日期 2003.05.28
申请人 INTEL CORPORATION 发明人 RUMER CHRISTOPHER L.;ZARBOCK EDWARD A.
分类号 H01L23/48;H01L23/498;H01L23/538;H01L25/065;(IPC1-7):H01L23/48;H01L23/52;H01L23/34;H01L29/40 主分类号 H01L23/48
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