发明名称 Method of forming a reactive material and article formed thereby
摘要 A method for preventing contamination, oxidation and gas absorption of reactive materials, and articles formed thereby. The method generally entails depositing a first layer of a reactive material and a second layer of a substantially nonreactive material so that the second layer protects the first layer from a surrounding atmosphere. For example, the first and second layers may be deposited to form a film on a surface within a chamber that is desired to be maintained in a vacuum during use of the article. The second layer is sufficiently thin such that appropriately heating the first and second layers causes the reactive material of the first layer to become interdiffused with the nonreactive material of the second layer, to the extent that at least a portion of the reactive material is able to react and getter gases from the surrounding atmosphere.
申请公布号 US6923625(B2) 申请公布日期 2005.08.02
申请号 US20030338351 申请日期 2003.01.07
申请人 INTEGRATED SENSING SYSTEMS, INC. 发明人 SPARKS DOUGLAS RAY
分类号 B32B9/00;(IPC1-7):F04F11/00;F04B37/02;H01J7/18;H01J35/20;H01L23/20 主分类号 B32B9/00
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