发明名称 Apparatus to orientate a body with respect to a surface
摘要 An apparatus to orientate a body with respect to a surface spaced-apart from the body. The apparatus comprises a flexure system having a first flexure member defining a first axis of rotation and a second flexure member defining a second axis of rotation. A body is coupled to the flexure system, and an actuation system is coupled to the flexure system. The body is coupled to the flexure system to rotate about the first and the second axes in response to movement caused by the actuation system. The movement of the body about the first axis being decoupled from movement of the body about the second axis.
申请公布号 US6922906(B2) 申请公布日期 2005.08.02
申请号 US20040775707 申请日期 2004.02.10
申请人 BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM 发明人 CHOI BYUNG JIN;SREENIVASAN SIDLGATA V.;JOHNSON STEPHEN C.
分类号 G03F7/20;G03F7/00;G03F9/00;H01L21/027;H02N2/00;(IPC1-7):G01B2/25 主分类号 G03F7/20
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