发明名称 Piezoelectric vibrator and manufacturing method thereof
摘要 A piezoelectric vibrator has a container having a hermetically sealed cavity and a transparent portion for transmitting therethough a laser beam into the hermetically sealed cavity. A piezoelectric vibrator piece is disposed in the hermetically sealed cavity. A gettering substance is disposed directly on a surface of the piezoelectric vibrator piece so that when a laser beam is irradiated on the metal film through the transparent portion of the container the metal film is vaporized to absorb any gases contained in the hermetically sealed cavity of the container to thereby increase a degree of vacuum within the hermetically sealed cavity.
申请公布号 US6924582(B2) 申请公布日期 2005.08.02
申请号 US20020281006 申请日期 2002.10.25
申请人 SEIKO INSTRUMENTS INC. 发明人 SHIMIZU SATOSHI;MATSUYAMA MASARU
分类号 H03H9/10;H03H3/02;H03H3/04;(IPC1-7):H01L41/08 主分类号 H03H9/10
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