发明名称 Semiconductor device and method of manufacturing the same
摘要 In a bottom gate type semiconductor device made of a semiconductor layer with crystal structure, source/drain regions are constructed by a lamination layer structure including a first conductive layer (n<SUP>+</SUP> layer), a second conductive layer (n<SUP>-</SUP> layer) having resistance higher than the first conductive layer, and an intrinsic or substantially intrinsic semiconductor layer (i layer). At this time, the n<SUP>-</SUP> layer acts as LDD region, and the i layer acts as an offset region is a film thickness direction.
申请公布号 US6924528(B2) 申请公布日期 2005.08.02
申请号 US20030428092 申请日期 2003.05.02
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;KOYAMA JUN;FUKUNAGA TAKESHI
分类号 G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/12;(IPC1-7):H01L29/76;H01L29/04 主分类号 G02F1/1368
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