摘要 |
An electron beam projection reaction device for projecting an electron beam to an object to be processed such as waste gas and thereby changing the physical properties of the waste gas, in which flexible sealing member (23) is provided between the periphery of the end of a scanning tube (12) and the peripheral part (18a) of an electron beam receiving window in the side wall of an electron beam reaction device (18) so as to connect the end of the scanning tube (12) and the side wall and seal off the reaction device. As a result no overstress is caused in the connection part, no secondary metallic window foil is needed, and the object to be processed does not leak outside.
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