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发明名称
EQUIPMENTS FOR PRODUCING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20050076898(A)
申请公布日期
2005.07.29
申请号
KR20040004688
申请日期
2004.01.26
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, BYOUNG SOO
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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