| 摘要 |
In an in-line type fluid pressure sensor for determining the fluid pressure in flow of a fluid circulated through a fluid flow circuit employed in a semiconductor manufacturing apparatus, an inner wall surface located particularly in a downstream side connection port ( 6 ) of a body member ( 1 ) of the sensor is moderately inclined in contour in longitudinal section, which makes it possible for the fluid to flow through a fluid introduction portion ( 9 a) of the body member ( 1 ) in a smooth manner without standing in flow in the fluid introduction portion ( 9 a). Due to this, in such a fluid introduction portion ( 9 a), there is not any fear of occurrence of the fluid flow standing phenomenon or problem at all. This makes it possible for the in-line type fluid pressure sensor to realize a precise measurement of the fluid pressure in flow of the fluid circulated through the fluid flow circuit.
|
