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发明名称
CHUCK WITH INTEGRATED WAFER SUPPORT
摘要
An improved chuck with lift pins within a probe station.
申请公布号
WO2005067445(A2)
申请公布日期
2005.07.28
申请号
WO2004US30276
申请日期
2004.09.14
申请人
CASCADE MICROTECH, INC.;ANDREWS, PETER;FROEMKE, BRAD;DUNKLEE, JOHN
发明人
ANDREWS, PETER;FROEMKE, BRAD;DUNKLEE, JOHN
分类号
G01R31/02;G01R31/26;G01R31/28
主分类号
G01R31/02
代理机构
代理人
主权项
地址
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