| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece handler and an alignment assembly. SOLUTION: This assembly is provided with a first port connected to disk substrate multiple tubes, one or a plurality of gas jet flows arranged near a center defined by inner margin dimensions of the disk substrate multiple tubes, and a second port connected to the plurality of jet flows. Through the gas jet flows, gases are sprayed to the center of the disk substrate. COPYRIGHT: (C)2005,JPO&NCIPI
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