发明名称 Device and method for surface working
摘要 The invention relates to a method for surface working of a body having a first surface to be worked and a second surface to be worked. The method includes, in a first step, providing a first tool and a second tool, in a second step, placing the body between the first tool and the second tool, and, in a third step, working the first surface and the second surface. The first surface is worked by a first working surface of the first tool, the first working surface having a first central area. The second surface is worked by a second working surface of the second tool, the second working surface having a second central area. In the third step, the second tool lies opposite to the first tool to form a working gap, the working gap mainly extending in a working gap plane. Furthermore, in the third step, the body, in at least one guide movement, is guided substantially parallel to the working gap plane between the first tool and the second tool, and at least a part of at least one of the first surface and the second surface is guided over the central area of the associated one of the first working surface and the second working surface. The invention further relates to a corresponding device for surface working.
申请公布号 US2005164605(A1) 申请公布日期 2005.07.28
申请号 US20040016261 申请日期 2004.12.17
申请人 CARL ZEISS SMT AG 发明人 AEUGLE HELLMUTH;HOGA JOACHIM;IRTENKAUF THOMAS;RUPP WOLFGANG
分类号 B24B7/17;B24B13/015;B24B37/04;B24B37/08;B24B49/00;(IPC1-7):B24B49/00 主分类号 B24B7/17
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