发明名称 |
Apparatus for manufacturing photovoltaic elements |
摘要 |
An apparatus for efficiently and continuously mass-producing a photovoltaic element by a plasma CVD method having an excellent current-voltage characteristic and excellent photoelectric conversion efficiency. The apparatus has a first chamber where raw material gas flows from top to bottom. A second chamber is connected to the first chamber by a separating path and causes the raw material gas to flow from bottom to top along the movement direction of the long substrate.
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申请公布号 |
US2005161077(A1) |
申请公布日期 |
2005.07.28 |
申请号 |
US20030625041 |
申请日期 |
2003.07.23 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OKABE SHOTARO;FUJIOKA YASUSHI;KANAI MASAHIRO;SAKAI AKIRA;SAWAYAMA TADASHI;KOHDA YUZO;HORI TADASHI;YAJIMA TAKAHIRO |
分类号 |
G03G5/08;C23C16/50;C23C16/511;H01L21/205;H01L31/04;H01L31/075;H01L31/20;(IPC1-7):H01L31/00 |
主分类号 |
G03G5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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