发明名称 |
Method for shaping pole pieces of magnetic heads by chemical mechanical polishing |
摘要 |
A thin film magnetic head that includes an improved P 2 pole tip/yoke interface. The process for forming the P 2 pole tip/yoke interface includes a CMP polishing step that is performed on the surface of the wafer subsequent to the plating of the P 2 pole tip. This CMP step utilizes a relatively soft polishing pad and an acidic polishing slurry which preferentially attacks the P 2 pole tip material, such that the CMP step results in the recession of the upper surface of the P 2 pole tip relative to the dielectric layer surrounding it, as well as the significant rounding of the upper edges of the dielectric trench in which the P 2 pole tip is formed. Thereafter, when the yoke is plated onto the P 2 pole tip the rounded upper edges of the dielectric trench result in a concave curved interface between the yoke and the P 2 pole tip.
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申请公布号 |
US2005160586(A1) |
申请公布日期 |
2005.07.28 |
申请号 |
US20050090087 |
申请日期 |
2005.03.24 |
申请人 |
LAHIRI ASHOK;PONG LEE EDWARD H.;LEE ERIC J.;XU HONG |
发明人 |
LAHIRI ASHOK;PONG LEE EDWARD H.;LEE ERIC J.;XU HONG |
分类号 |
G11B5/012;G11B5/31;(IPC1-7):G11B5/127;G11B5/147 |
主分类号 |
G11B5/012 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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