,申请号JP20050002838U-传众专利搜索

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发明名称
摘要
申请公布号	JP3111563(U)	申请公布日期	2005.07.28
申请号	JP20050002838U	申请日期	2005.04.01
申请人		发明人
分类号	C23C16/44;C23C16/50;C23C16/511;C23F4/00;F23G5/00;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):F23G5/00	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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