<p>An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.</p>
申请公布号
WO2005069331(A1)
申请公布日期
2005.07.28
申请号
WO2004US36359
申请日期
2004.11.02
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;PIRELLI & C. S.P.A.;NIELSON, GREGORY, N.;BARBASTATHIS, GEORGE