OPTICAL SCANNING USING VIBRATORY DIFFRACTION GRATINGS

摘要

An optical scanning apparatus includes an in-plane vibratory mass platform (110) having at least one diffraction grating (100) formed thereon as the scanning element, at least one flexure structure (120) that connects the mass platform to at least one fixed support (130), and at least one driving actuator (150) that drives the mass platform (110) into an in-plane vibratory motion (190) which can be rotational and/or translational (190). The apparatus may also be formed by a mass platform (110) having at least one diffraction grating (100) formed thereon as the scanning element, at least one driving actuator (150) connected to the mass platform (110) through at least one flexure structure (120). The driving actuator (150) drives the mass platform (110) into an in-plane vibratory motion (190).