METHOD OF FORMING MASK PATTERN ON SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a two-dimensional mask pattern on a substrate.

SOLUTION: The method of forming the two-dimensional mask pattern on the substrate (1) comprises (a) printing a non-electrically conductive material (2) on the substrate in a coarse version of the required mask patterns (3A to 3D) and (b) selectively ablating a portion (3B) of the material using a laser to refine the coarse pattern to form the desired mask pattern.

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