摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric resonance component whose frequency can efficiently be adjusted with high precision nearly in the state of a complete article and which hardly has a short circuit defect due to irradiation with an ion beam and laser light when the frequency adjustment is carried out. SOLUTION: The piezoelectric resonance component having, on a top surface 2a of a substrate 2, a capacitor element 6 mounted by being joined with electrodes 4a to 4c with conductive adhesives 5a to 5c, and also having an energy confinement type piezoelectric resonance element 8 fixed onto the capacitor element 6 includes a recessed part 6e on a reverse surface of a dielectric substrate 6a of the capacitor element 6 below where vibration electrodes 10 and 11 face each other, and in the recessed part 6e, a conductive adhesive 5b electrically connects an electrode 4b and a common electrode 6d of the substrate 2 together, and a conductive adhesive 5b projects neither a flank 6a1 nor 6a2 of the dielectric substrate 6a. COPYRIGHT: (C)2005,JPO&NCIPI
|